Suppression of Capacitor Leakage Through Thermal Budget Control in DRAM With ZrO2 Based Dielectrics

Suppression of Capacitor Leakage Through Thermal Budget Control in DRAM With ZrO2 Based Dielectrics

Oct 25, 2025 - 22:40
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Suppression of Capacitor Leakage Through Thermal Budget Control in DRAM With ZrO2 Based Dielectrics
Suppression of Capacitor Leakage Through Thermal Budget Control in DRAM With ZrO2 Based Dielectrics

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